Small diameter (125 um ) fiber optic pressure sensor has been developed for measuring locai internal pressure for example blood pressure in blood vessel during catheterization.
A thin diaphragm is formed at the end of an optical fiber using MEMS technology
and the deformation by the pressure is detected interferometrically.
This fiber-optic sensor is electrical hazard free and its signal is not affected by an electromagnetic interference.
References:
[1] Y.Haga, K.Minami, S.Shoji, S.Nitta, M.Tanaka and M.Esashi, "A
Fiber-Optic Ultra Miniature Pressure Sensor", Technical Digest of
the 12th Sensor Symposium (1994), p135-138
[2] T.Katsumata, Y.Haga, K.Minami and M.Esashi, "Micromachined 125ƒÊm
Diameter Ultra Miniature Fiber-Optic Pressure Sensor for Catheter
Trans. IEE of Japan, Vol. 120-E No. 2 (2000), p58-63
[3] K. Totsu, Y. Haga and M. Esashi, "Ultra-miniature fiber-optic pressure sensor using white light interferometry," Journal of Micromechanics and Microengineering, Vol. 15, No. 1 (2005), pp. 71-75