S. Tanaka Laboratory is using the following well-equipped facilities to develop MEMS. All members are allowed to access all of the facilities after a safety class. We are also taking care of many tools in the facilities.

Aobayama Campus from Drone (2017)

Division of Mechanical Engineering

  ・Cleanroom operated by S. Tanaka Laboratory
    - 130 m2 nice cleanroom mainly for 20 mm substrates
    - Many laboratory-made tools installed
    - The best MEMS research environment for beginners to experts

  ・Micro/Nano-Machining Research and Education Center (MNC) [Link] [Movie]
    - Common facility belonging to Graduate School of Engineering
    - 600 m2 and 150 m2 well-equipped cleanrooms and 6 common laboratories
    - Many MEMS tools operated by S. Tanaka Laboratoy

Junichi Nishizawa Memorial Research Center

  ・Jun-ichi Nishizawa Memorial Research Center
    - Large common facility and rental spaces with 5000 m2 area in total
    - Donation from Semiconductor Research Institute in 2008
  ・2F super cleanroom with 1800 m2 area [Movie]
    - Open facility for MEMS development
    - Many tools for 4 and 6 inch wafers
    - Hands-on Access Laboratory system for spot users [Link]
  ・Project Laboratory in 3F cleanroom
  ・Administration office of Microsystem Integration Center (μSIC) [Link]

S. Tanaka Laboratory for Smart System Integration, Chair of Nanosystem, Department of Robotics, Tohoku University
Division of Mechanical Engineering, 6-6-01 Aramaki aza Aoba, Aoba-ku, Sendai, Miyagi 980-8579
TEL: 022-795-6937 FAX: 022-795-6935